Fig. 6　Variation of frequency characteristics of the impedance(real part) for No.1 unit.

Fig. 7　Variation of frequency characteristics of the impedance(imaginary part) for No.1 unit.

Fig. 8　Variation of frequency characteristics of the displacement-current sensitivity for No.1 unit.

Fig. 9　Variation of the impedance (real part) at 1150Hz of five driving units.

Fig. 10　Variation of the impedance (imaginary part) at 1150Hz of five driving units.

Fig. 11　Variation of the displacement-current sensitivity at 1150Hz of five driving units.

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