Thus, the roughness (A-B signal) of the surface of the sample can be obtained by the signal processing of each detector in addition to the regular secondary electron image. By using such characteristics of the three-dimensional SEM, the condition of roughness of the surface which was vague only by the observation by the optical microscope can be judged without any mistaken interpretation.

　

Fig. 6　Surface observation of pin specimen by different two methods

　

3.2.2 Results of EPMA Analysis

Fig. 7 shows the results of the EPMA analysis of the part in the vicinity of the part A and the part B observed in 3.2.1 above. (a) and (b) show the distribution of the main phases (the main composition of the sample is chromium oxide and molybdenum).

BACK　　　CONTENTS　　　NEXT